Equipment

Overview

The materials engineering electron microscopy & characterization laboratory exists to provide access and training that enables our students and researchers to unlock new understanding of materials and how we make them. To achieve this goal, we provide access to a suite of high quality instrumentation and provide training for our users, as well as supporting the undergraduate curriculum in materials engineering.

The laboratory is set up with a few major instrument and equipment clusters: (1) scanning electron microscopes, equipped with analytical capabilities; (2) X-ray diffraction; (3) sample preparation equipment. The lab is staffed by a full time technician, Heli Eunike, and is supported academically by many faculty members in the Department of Materials Engineering. A Faculty point of contact for the lab is Dr Ben Britton. Click here for a poster overview of our facility.

Table of Contents

Scanning Electron Microscopy

Focused Ion Beam Microscopy

Scanning Transmission Electron Microscopy

X-ray Diffraction and Spectroscopy

Sample Preparation

Scanning Electron Microscopes (SEM)

In brief, a scanning electron microscope scan a highly focused electron beam across the surface of a sample. At each point, signals are collected and micrographs can be created. These micrographs (aka images) can be used to understand the structure, morphology, chemistry and microstructure of a well prepared material. The (relatively) small sample is held under vacuum and typically must be reasonable conductive for analysis. Surface topography can be evaluated through analysis of secondary electron and topographical backscatter electron micrographs. Chemistry can be analysis using compositional backscatter electron micrographs and energy dispersive X-ray spectroscopy.

For further information on the basics of scanning electron microscopy, we recommend the following resources: MyScope – Training Materials; Principles of Scanning Electron Microscopy – Thermo Fisher Scientific; and a brief lecture captured on YouTube by Dr Britton.

Field Emission Gun SEM:

Thermo Fisher Apreo 2 ChemiSEM, with EDX and EBSD

This is a state-of-the-art field emission scanning electron microscope, equipped with analytical chemical analysis (EDX) and electron backscatter diffraction. The system is equipped with the trinity detectors which provide T1-3 imaging modes that include backscatter, near surface and very near surface imaging modes. The microscope can be operated with stage bias, enabling a range of voltages (100 eV to 30 keV) that provide the ability to optimize imaging of a wider variety of samples. The EDX detector is a TrueSight system, developed by Thermo Fisher and it includes the ChemiSEM option which provides very quick phase analysis and chemical identification, as well as quantitative analysis. The electron backscatter diffraction is a cutting edge direct electron detector based TruePix system. As part of the active research project that funded the instrument via the CFI-JELF and BCKDF funding, the system is also being upgrade to provide robotic and remote operation.

Click here for an overview of the Apreo ChemiSEM, with example analysis case studies.

TESCAN MIRA

This is a FEG-SEM equipped with 4D STEM, a 4 quadrant backscatter electron detector, and a water cooled BSE detector. It is capable of performing imaging (secondary, backscatter), as well as forming electron channeling patterns (ECP) and electron channeling contrast imaging (ECCI). It is being set up to capable of in situ mechanical testing with a 2kN MT2000EH stage. The chamber can be operated as a variable pressure FEG-SEM.

This equipment was funded by the CFI-IF and BCKDF “Materials for Net Zero” funding. This instrument is housed in Brimacombe 63.

Click here for the MIRA booking rules.

 

Thermionic Emitter based SEM:

FEI Quanta 650 with large area EDX

The FEI Quanta 650 is a large chamber Tungsten hairpin filament SEM with environmental imaging capability. Environmental imaging allows for imaging and elemental analysis of uncoated non-conductive specimens. Properly equipped, liquid water can be imaged, but not as the machine is currently configured. The system is equipped with a backscatter detector as well as a full EDX analysis system with a large area detector. The EDX system can be used to analyze polished samples quantitatively in conjunction with appropriate standards. The EDX software can also be configured for automated particle detection and analysis.

Thermo Fisher Scientific Phenom XL GL2

The Phenom XL GL2 is a table top scanning electron microscope, equipped with an integrated optical microscope (for sample finding) and CeB6 source. Micrographs can be captured using secondary or backscatter electron detectors, with a resolution of <10 nm. For chemical analysis, this is also equipped with a built in energy dispersive X-ray spectrometer for basic EDX analysis, and the ChemiSEM technique. The instrument also is equipped with the MAPS 3 platform from Thermo Fisher Scientific which enables very large area mapping and correlative multi-modal microscopy. The instrument can operate with a variety of accelerating voltages (5-15 kV) and at low and high vacuum. This instrument can be transported to other sites, e.g. for outreach and public engagement. The instrument data sheet can be found here.

This instrument is incredibly easy to use, and most users can quickly be up and running and collecting data with very minimal training.

Click here for an overview poster of the Phenom GL2.

Hitachi S3000N VP-SEM with EDX

The Hitachi S3000N is a conventional Tungsten hairpin filament source SEM with variable pressure capability.  Variable pressure allows for imaging and elemental analysis of uncoated non-conductive specimens.  The system is equipped with a backscatter detector as well as a full EDX analysis system.

 

Focused Ion Beam – Scanning Electron Microscopes

TESCAN AMBER-X, with EBSD and EDX

This is an analytical ‘high volume electron microscope’ capable of performing 3D tomography using a focused plasma of Xe-ions to remove the surface layers of a sample, subsequent imaging of the sample using the electron beam can be performed to conduct tomography. The system is equipped with three backscatter detectors: LE-BSE (for 3D analysis), 4Q-BSE (for compositional analysis and topographic analysis), and WC-BSE (for sample heating experiments). It has a Bright Field/Dark Field/High Angle Annular Dark Field (HAADF) STEM detector. The system is equipped with a Xe-based plasma FIB, a tungsten based gas injection system (GIS), and a X-Y-Z nanomanipulator needle. It is equipped with a Oxford Instruments Symmetry S2 EBSD detector and an Ultimax 170 EDS detector. It is equipped with large area montage imaging, programmatic API, and slice-and-view (electron imaging) and 3D-analtyical tomography. It can perform electron channeling contrast imaging (ECCI) and electron channeling pattern (ECP) analysis, and is equipped with a ‘rocking’ stage (X-Y-Z-R-Tilt x-Tilt y).

This equipment was funded by the CFI-IF and BCKDF “AM+” funding. This instrument is housed in Brimacombe 63. Click here for the AMBER-X pFIB booking rules.

TESCAN AMBER 2, with Gentle Ion Beam (Coming soon!)

This is a gallium based focused ion beam field emission gun scanning electron microscope (GaFIB-SEM) primarily established for sample preparation and STEM-in-SEM based imaging. The instrument configuration has been set up to provide cross sectional analysis, Ga-based FIB-SEM tomography and TEM-foil lift out. Unique to this equipment is the additional ‘AURA’ gentle ion beam system which provides low kV Ar-ion polishing to improve sample quality. It is equipped with a Pt gas injection system (GIS), t has a Bright Field/Dark Field/High Angle Annular Dark Field (HAADF) STEM detector, and LE-BSE. It comes equipped with automatic TEM lamella preparation capabilities.

This equipment is being funded by the CFI-IF and BCKDF “Materials for Net Zero” funding. This instrument will be housed in Brimacombe 71.

Scanning Transmission Electron Microscope

TESCAN TENSOR (Coming soon!)

This instrument is a 100 kV analytical scanning transmission electron microscope. It is configured for imaging, chemical analysis, electron diffraction and 4D-STEM. Electron diffraction is enabled with the additional capability of highly integrated scanning precession electron diffraction (SPED) and on-line diffraction pattern analysis, to provide ‘EBSD-like’ phase and orientation maps on the microscope. The system is equipped with a large DECTRIS QUADRO detector (512 x 512 pixels), which has high sensitivity and speed (operating at up to 2,250 fps @ 16 bit). The TENSOR is equipped with a double EDS-detector system, which collect characteristic X-rays with a very high solid angle of 2 SR. For more information on the TENSOR visit the TESCAN information site.

This equipment is being funded by the CFI-IF and BCKDF “Materials for Net Zero” funding. This instrument will be housed in Brimacombe 71.

X-ray apparatus

D6 Phaser X-ray Diffraction

The Bruker D6 PHASER is a high‑performance benchtop X‑ray diffractometer designed for advanced powder and thin‑film analysis, offering capabilities that rival many floor‑standing systems. It supports a wide range of XRD applications including phase identification and quantification, residual stress, texture, grazing‑incidence diffraction, and X‑ray reflectometry, aided by high source power (600W Cu-K-alpha), flexible beam optics, and a modern 1D LYNXEYE XE-T detector. We are equipped with a range of software licenses for high quality analysis in side the suite.

Thermo Fisher Nexsa G2 X-ray Photoelectron Spectrometer (XPS) (Coming soon!)

The system features a micro-focused X-ray probe with a spot size range of 10–400 µm, enabling both large-area chemical mapping through the “SnapMap” function and high-resolution scanning of targeted regions. Automated sample entry and transfer simplify workflows, complemented by Avantage 6 software (including a UBC site license) for comprehensive data analysis. The instrument integrates a MAGCIS monatomic and gas cluster ion beam for precise sputtering and surface cleaning, as well as a tilt sample holder for HAXPS measurements and an NX MEMS-based heater capable of operation from room temperature up to 800 °C. Advanced surface techniques such as Ion Scattering Spectroscopy (ISS) and Ultraviolet Photoelectron Spectroscopy (UVS) enable detailed analysis of surface bonding and valence band structure, respectively. Additional features include Reflected Electron Energy Loss Spectroscopy (REELS) for electronic structure analysis and charge compensation for insulating surfaces. A correlative sample holder facilitates seamless sample exchange between the PHENOM, APREO, and Nexsa platforms for integrated SEM–XPS analysis using MAPS, while the vacuum in/out capability and electrical bias holder further expand experimental flexibility.

This equipment is being funded by the CFI-IF and BCKDF “Materials for Net Zero” funding. This instrument will be housed in Brimacombe 71.

Sample Preparation

Gatan PECS II (precision etching and coating system) broad ion beam mill

The Gatan PECS II is a fully automated broad argon ion beam system designed to polish, etch, and coat samples in a single vacuum cycle, producing damage-minimized surfaces ideal for high-quality SEM, EBSD, EDS, CL, and other surface-sensitive analyses. Using two independently adjustable low-energy ion guns (0.1 – to – 8 keV range), it can finely tune milling conditions to reduce amorphous damage layers, while optional liquid nitrogen cooling helps mitigate heat-induced artifacts in temperature‑sensitive or soft materials. The system accommodates samples up to roughly 32 mm, incorporates WhisperLok-style load–lock and dry pumping for efficient vacuum handling, and offers an integrated touch-screen interface and in situ digital microscopy for real-time monitoring and reproducible preparation workflows that are accessible to both novice and expert users.

This equipment was funded by the CFI-IF and BCKDF “AM+” funding. This instrument is housed in the Brimacombe building.

Edwards 306 Evaporator

The Edwards 306 is a general high vacuum evaporation and coating system.  In the EM laboratory, it is primarily used for the coating of samples with carbon prior to elemental analysis.

Edwards S150A Sputter Coater

The Edwards S150A is a general purpose low vacuum sputter coater.  It is used for providing a conductive coating for non-conductive samples to aid in imaging.